HITACHI U-4100 Uv-Vis-Nir 8'' Wafer Testing System, METROLOGY

The U-4100 Spectrophotometer (large sample measurement system) is available for non- destructive transmittance/reflectance measurement of various optical and electronic materials including large-sized glass, silicon wafer and liquid crystal board.

Wafer Reflectance/Transmittance Measurement System. "Top-mount transmittance/reflectance measurement unit (relative) for U-4100 (P/N 134-0107)".

• This accessory permits measurement of the relative reflectance to the reference sample at an incident angle of 5° and measurement of the transmittance at an incident angle of 0°(the absolute reflectance cannot be measured with this accessory).
• The accessory also permits reflectance /transmittance measurement at a desired angle on a sample with the moving/rotating stage.