Available
Metrology - PIKE MAP300 Automatic Semiconductor Wafer Analyzer
Stock IDWELL2824
Price
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Item Descriptions
This Pike MAP300 is a fully automated accessory for the mapping analysis of wafers in specular reflection or transmission mode.
It can accept wafers up to 12-inch (300-mm) in diameter.
Key features
- Optional inserts for wafer sizes:2,4,6,8,12-inches
- EPI, BPSG, oxygen and carbon determination
Applications
- Specular reflectance and transmission sampling - standard
- A complete set combined with a FT-IR spectrometer for automated, multi-position measurements and mapping of semiconductor wafers.
Software and control
PC controller interface
Specifications
Up to 12-inch (300-mm) semiconductor wafer handling.
Included items
Purge Gas accessory for removal of atmospheric interferences
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